Publication:
Design and fabrication of SiGe MEMS structures with high intrinsic ESD robustness
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1832 since deposited on 2021-10-20
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Acq. date: 2026-03-16
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Statistics
Views
1832 since deposited on 2021-10-20
1last month
1last week
Acq. date: 2026-03-16
Citations