Publication:
Design and fabrication of SiGe MEMS structures with high intrinsic ESD robustness
Date
| dc.contributor.author | Sangameswaran, Sandeep | |
| dc.contributor.author | De Coster, Jeroen | |
| dc.contributor.author | Witvrouw, Ann | |
| dc.contributor.author | Groeseneken, Guido | |
| dc.contributor.author | De Wolf, Ingrid | |
| dc.contributor.imecauthor | De Coster, Jeroen | |
| dc.contributor.imecauthor | Groeseneken, Guido | |
| dc.contributor.imecauthor | De Wolf, Ingrid | |
| dc.contributor.orcidimec | De Wolf, Ingrid::0000-0003-3822-5953 | |
| dc.date.accessioned | 2021-10-20T15:42:21Z | |
| dc.date.available | 2021-10-20T15:42:21Z | |
| dc.date.issued | 2012 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/21454 | |
| dc.source.beginpage | 3.00E-04 | |
| dc.source.conference | IEEE International Reliability Physics Symposium - IRPS | |
| dc.source.conferencedate | 15/04/2012 | |
| dc.source.conferencelocation | Anaheim, CA USA | |
| dc.title | Design and fabrication of SiGe MEMS structures with high intrinsic ESD robustness | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
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