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Delivering new liquid metalorganic precursors into silicon Epi and CVD
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Delivering new liquid metalorganic precursors into silicon Epi and CVD
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Date
2014-12
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Woelk, Egbert
;
Loo, Roger
Journal
Solid State Technology
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1743
since deposited on 2021-10-22
1
last month
Acq. date: 2025-12-15
Citations
Metrics
Views
1743
since deposited on 2021-10-22
1
last month
Acq. date: 2025-12-15
Citations