Publication:
Delivering new liquid metalorganic precursors into silicon Epi and CVD
Date
| dc.contributor.author | Woelk, Egbert | |
| dc.contributor.author | Loo, Roger | |
| dc.contributor.imecauthor | Loo, Roger | |
| dc.contributor.orcidimec | Loo, Roger::0000-0003-3513-6058 | |
| dc.date.accessioned | 2021-10-22T08:21:49Z | |
| dc.date.available | 2021-10-22T08:21:49Z | |
| dc.date.issued | 2014-12 | |
| dc.identifier.issn | 0038-111X | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/24826 | |
| dc.identifier.url | http://electroiq.com/wp-content/uploads/magazines/sst_nov-dec_de.pdf | |
| dc.source.beginpage | 37 | |
| dc.source.endpage | 40 | |
| dc.source.issue | Dec | |
| dc.source.journal | Solid State Technology | |
| dc.title | Delivering new liquid metalorganic precursors into silicon Epi and CVD | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
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