Publication:
Significant Enhancement of HCD and TDDB in CMOS FETs by Mechanical Stress
| dc.contributor.author | Lee, Kookjin | |
| dc.contributor.author | Kaczer, Ben | |
| dc.contributor.author | Kruv, Anastasiia | |
| dc.contributor.author | Gonzalez, Mario | |
| dc.contributor.author | Eneman, Geert | |
| dc.contributor.author | Okudur, Oguzhan Orkut | |
| dc.contributor.author | Grill, Alexander | |
| dc.contributor.author | Franco, Jacopo | |
| dc.contributor.author | Vici, Andrea | |
| dc.contributor.author | Degraeve, Robin | |
| dc.contributor.author | De Wolf, Ingrid | |
| dc.contributor.imecauthor | Lee, Kookjin | |
| dc.contributor.imecauthor | Kaczer, Ben | |
| dc.contributor.imecauthor | Kruv, Anastasiia | |
| dc.contributor.imecauthor | Gonzalez, Mario | |
| dc.contributor.imecauthor | Eneman, Geert | |
| dc.contributor.imecauthor | Okudur, Oguzhan Orkut | |
| dc.contributor.imecauthor | Grill, Alexander | |
| dc.contributor.imecauthor | Franco, Jacopo | |
| dc.contributor.imecauthor | Vici, Andrea | |
| dc.contributor.imecauthor | Degraeve, Robin | |
| dc.contributor.imecauthor | De Wolf, Ingrid | |
| dc.contributor.orcidimec | Lee, Kookjin::0000-0002-9896-1090 | |
| dc.contributor.orcidimec | Kaczer, Ben::0000-0002-1484-4007 | |
| dc.contributor.orcidimec | Gonzalez, Mario::0000-0003-4374-4854 | |
| dc.contributor.orcidimec | Eneman, Geert::0000-0002-5849-3384 | |
| dc.contributor.orcidimec | Okudur, Oguzhan Orkut::0000-0002-4790-7772 | |
| dc.contributor.orcidimec | Grill, Alexander::0000-0003-1615-1033 | |
| dc.contributor.orcidimec | Franco, Jacopo::0000-0002-7382-8605 | |
| dc.contributor.orcidimec | De Wolf, Ingrid::0000-0003-3822-5953 | |
| dc.date.accessioned | 2023-06-08T13:28:00Z | |
| dc.date.available | 2023-02-27T03:28:18Z | |
| dc.date.available | 2023-06-08T13:28:00Z | |
| dc.date.issued | 2022 | |
| dc.identifier.doi | 10.1109/IRPS48227.2022.9764540 | |
| dc.identifier.eisbn | 978-1-6654-7950-9 | |
| dc.identifier.issn | 1541-7026 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/41173 | |
| dc.publisher | IEEE | |
| dc.source.conference | IEEE International Reliability Physics Symposium (IRPS) | |
| dc.source.conferencedate | MAR 27-31, 2022 | |
| dc.source.conferencelocation | Dallas | |
| dc.source.journal | na | |
| dc.source.numberofpages | 6 | |
| dc.subject.keywords | DEGRADATION | |
| dc.subject.keywords | DEVICE | |
| dc.title | Significant Enhancement of HCD and TDDB in CMOS FETs by Mechanical Stress | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
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