Publication:

Gate stack preparation with high-k materials in a cluster tool

Date

2001

Proceedings Paper

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Author(s)

De Gendt, Stefan

;

;

Conard, Thierry

;

Nohira, Hiroshi

;

Richard, Olivier

;

Vandervorst, Wilfried

;

;

;

Tuominen, Marko

;

Bajolet, Philippe

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Acq. date: 2026-03-16