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Photoemission spectroscopy on photoresist materials: A protocol for analysis of radiation sensitive materials
Publication:
Photoemission spectroscopy on photoresist materials: A protocol for analysis of radiation sensitive materials
Date
2023
Journal article
https://doi.org/10.1116/6.0002808
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Sajjadian, Faegheh
;
Galleni, Laura
;
Dorney, Kevin
;
Singh, Dhirendra
;
Holzmeier, Fabian
;
van Setten, Michiel
;
De Gendt, Stefan
;
Conard, Thierry
Journal
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
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892
since deposited on 2023-08-12
Acq. date: 2025-10-27
Citations
Metrics
Views
892
since deposited on 2023-08-12
Acq. date: 2025-10-27
Citations