Publication:
Photoemission spectroscopy on photoresist materials: A protocol for analysis of radiation sensitive materials
| dc.contributor.author | Sajjadian, Faegheh | |
| dc.contributor.author | Galleni, Laura | |
| dc.contributor.author | Dorney, Kevin | |
| dc.contributor.author | Singh, Dhirendra | |
| dc.contributor.author | Holzmeier, Fabian | |
| dc.contributor.author | van Setten, Michiel | |
| dc.contributor.author | De Gendt, Stefan | |
| dc.contributor.author | Conard, Thierry | |
| dc.contributor.imecauthor | Galleni, Laura | |
| dc.contributor.imecauthor | Holzmeier, Fabian | |
| dc.contributor.imecauthor | De Gendt, Stefan | |
| dc.contributor.imecauthor | Conard, Thierry | |
| dc.contributor.imecauthor | Sajjadian, Faegheh | |
| dc.contributor.imecauthor | Dorney, Kevin | |
| dc.contributor.imecauthor | Singh, Dhirendra | |
| dc.contributor.imecauthor | van Setten, Michiel | |
| dc.contributor.orcidimec | Galleni, Laura::0000-0002-6675-7829 | |
| dc.contributor.orcidimec | Holzmeier, Fabian::0000-0001-8749-5330 | |
| dc.contributor.orcidimec | De Gendt, Stefan::0000-0003-3775-3578 | |
| dc.contributor.orcidimec | Conard, Thierry::0000-0002-4298-5851 | |
| dc.contributor.orcidimec | Dorney, Kevin::0000-0003-2097-6994 | |
| dc.contributor.orcidimec | Singh, Dhirendra::0000-0002-8855-0597 | |
| dc.contributor.orcidimec | van Setten, Michiel::0000-0003-0557-5260 | |
| dc.date.accessioned | 2024-03-12T10:30:30Z | |
| dc.date.available | 2023-08-12T17:29:09Z | |
| dc.date.available | 2024-03-12T10:30:30Z | |
| dc.date.issued | 2023 | |
| dc.description.wosFundingText | We would like to express our sincere gratitude to Paul van der Heide and John Petersen for their kind support. K.M.D and D.P.S. acknowledge funding from the European Union's Horizon 2020 Research and Innovation Programme under the Marie Sklodowska-Curie Grant Agreement No.s 101031245 (K.M.D.) and 101032241 (D.P.S.). | |
| dc.identifier.doi | 10.1116/6.0002808 | |
| dc.identifier.issn | 0734-2101 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/42327 | |
| dc.publisher | A V S AMER INST PHYSICS | |
| dc.source.beginpage | Art. 053206 | |
| dc.source.endpage | N/A | |
| dc.source.issue | 5 | |
| dc.source.journal | JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A | |
| dc.source.numberofpages | 14 | |
| dc.source.volume | 41 | |
| dc.subject.keywords | APPROXIMATION | |
| dc.title | Photoemission spectroscopy on photoresist materials: A protocol for analysis of radiation sensitive materials | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
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