Publication:
Recombination probabilities of O and H atoms on the surface of nanoporous low dielectric constant SiCOH films
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1926 since deposited on 2021-10-17
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Acq. date: 2026-01-08
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1926 since deposited on 2021-10-17
1last month
1last week
Acq. date: 2026-01-08
Citations