Experimental studies of dose retention and activation in fin field-effect-transistor-based structures

Mody, Jay; Duffy, Ray; Eyben, Pierre; Goossens, Jozefien; Moussa, Alain; Polspoel, Wouter; Berghmans, Bart; Van Dal, Mark; Pawlak, Bartek; Kaiser, Monja; Weemaes, R. G. R.; Vandervorst, Wilfried

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Experimental studies of dose retention and activation in fin field-effect-transistor-based structures

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2010

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Vandervorst, Wilfried

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Journal of Vacuum Science and Technology B

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Acq. date: 2026-05-19

Experimental studies of dose retention and activation in fin field-effect-transistor-based structures

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