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Experimental studies of dose retention and activation in fin field-effect-transistor-based structures
Publication:
Experimental studies of dose retention and activation in fin field-effect-transistor-based structures
Date
2010
Journal article
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Mody, Jay
;
Duffy, Ray
;
Eyben, Pierre
;
Goossens, Jozefien
;
Moussa, Alain
;
Polspoel, Wouter
;
Berghmans, Bart
;
Van Dal, Mark
;
Pawlak, Bartek
;
Kaiser, Monja
;
Weemaes, R. G. R.
;
Vandervorst, Wilfried
Journal
Journal of Vacuum Science and Technology B
Abstract
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2000
since deposited on 2021-10-18
Acq. date: 2025-10-23
Citations
Metrics
Views
2000
since deposited on 2021-10-18
Acq. date: 2025-10-23
Citations