Publication:

Experimental studies of dose retention and activation in fin field-effect-transistor-based structures

Date

2010
Journal article
Simple item page Full metadata Statistics
 
dc.contributor.authorMody, Jay
dc.contributor.authorDuffy, Ray
dc.contributor.authorEyben, Pierre
dc.contributor.authorGoossens, Jozefien
dc.contributor.authorMoussa, Alain
dc.contributor.authorPolspoel, Wouter
dc.contributor.authorBerghmans, Bart
dc.contributor.authorVan Dal, Mark
dc.contributor.authorPawlak, Bartek
dc.contributor.authorKaiser, Monja
dc.contributor.authorWeemaes, R. G. R.
dc.contributor.authorVandervorst, Wilfried
dc.contributor.imecauthorEyben, Pierre
dc.contributor.imecauthorMoussa, Alain
dc.contributor.imecauthorVan Dal, Mark
dc.contributor.imecauthorPawlak, Bartek
dc.contributor.imecauthorVandervorst, Wilfried
dc.date.accessioned2021-10-18T19:15:21Z
dc.date.available2021-10-18T19:15:21Z
dc.date.embargo9999-12-31
dc.date.issued2010
dc.identifier.issn1071-1023
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/17647
dc.source.beginpageC1H5
dc.source.endpageC1H13
dc.source.issue1
dc.source.journalJournal of Vacuum Science and Technology B
dc.source.volume28
dc.title

Experimental studies of dose retention and activation in fin field-effect-transistor-based structures

dc.typeJournal article
dspace.entity.typePublication
Files

Original bundle

Name:
19604.pdf
Size:
4.78 MB
Format:
Adobe Portable Document Format
Download
Publication available in collections:
Articles