Publication:
Influence of halo implant on leakage current and sheet resistance of ultra-shallow p-n junctions
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1897 since deposited on 2021-10-16
1last month
Acq. date: 2026-03-17
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Statistics
Views
1897 since deposited on 2021-10-16
1last month
Acq. date: 2026-03-17
Citations