Publication:

Multiple patterning: step by step towards 1X nm hp

Date

2010
Proceedings Paper
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Author(s)

Wiaux, Vincent  
;
Wong, Patrick  
;
Vandenbroeck, Nadia  
;
Bekaert, Joost  
;
Laenens, Bart
;
De Bisschop, Peter  
;
Versluijs, Janko  
;
Vandenberghe, Geert  

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1957 since deposited on 2021-10-19
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1957 since deposited on 2021-10-19
Acq. date: 2026-01-26

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