Wafer alignment mark placement accuracy impact on the layer to layer overlay performance

Publication:

2019

Proceedings Paper

Author(s)

;

Steinert, Steffen

;

Mouraille, Orion

;

;

Van Dijk, Leon

;

;

Beyer, Dirk

2032 since deposited on 2021-10-27

4last month

Acq. date: 2026-04-06