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Articles
Selective removal of high-k dielectrics
Publication:
Selective removal of high-k dielectrics
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Date
2009
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18136.pdf
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Shamiryan, Denis
;
Baklanov, Mikhaïl
;
Claes, Martine
;
Boullart, Werner
;
Paraschiv, Vasile
Journal
Chemical Engineering Communications
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1831
since deposited on 2021-10-18
Acq. date: 2025-12-15
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Downloads
1
since deposited on 2021-10-18
Acq. date: 2025-12-15
Views
1831
since deposited on 2021-10-18
Acq. date: 2025-12-15
Citations