Publication:

Selective removal of high-k dielectrics

Date

2009
Journal article
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dc.contributor.authorShamiryan, Denis
dc.contributor.authorBaklanov, Mikhaïl
dc.contributor.authorClaes, Martine
dc.contributor.authorBoullart, Werner
dc.contributor.authorParaschiv, Vasile
dc.contributor.imecauthorClaes, Martine
dc.contributor.imecauthorBoullart, Werner
dc.contributor.imecauthorParaschiv, Vasile
dc.contributor.orcidimecBoullart, Werner::0000-0001-7614-2097
dc.date.accessioned2021-10-18T02:55:15Z
dc.date.available2021-10-18T02:55:15Z
dc.date.embargo9999-12-31
dc.date.issued2009
dc.identifier.issn0098-6445
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/16204
dc.source.beginpage1475
dc.source.endpage1535
dc.source.journalChemical Engineering Communications
dc.source.volume196
dc.title

Selective removal of high-k dielectrics

dc.typeJournal article
dspace.entity.typePublication
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