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Optimisation of a pre-metal-dielectric with a contact etch stop layer for 0.18μm and 0.13μm technologies
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2 since deposited on 2021-10-14
Acq. date: 2025-10-24
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1930 since deposited on 2021-10-14
Acq. date: 2025-10-24
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2 since deposited on 2021-10-14
Acq. date: 2025-10-24
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1930 since deposited on 2021-10-14
Acq. date: 2025-10-24
Citations