Publication:
Performance enhancement of Poly-Si/TiN/SiON based pMOSFETs by addition of an AlO capping layer
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1901 since deposited on 2021-10-16
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Acq. date: 2026-01-12
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Views
1901 since deposited on 2021-10-16
1last month
1last week
Acq. date: 2026-01-12
Citations