Publication:

Performance enhancement of Poly-Si/TiN/SiON based pMOSFETs by addition of an AlO capping layer

Date

2007
Journal article
Simple item page Full metadata Statistics
Loading...
Thumbnail Image

Author(s)

Singanamalla, Raghunath
;
Yu, HongYu
;
O'Sullivan, Barry  
;
Petry, Jasmine
;
Mercha, Abdelkarim  
;
Paraschiv, Vasile  
;
Volders, Henny  
;
Kubicek, Stefan  
;
De Meyer, Kristin  
;
Biesemans, Serge  

Journal

Microelectronic Engineering

Abstract

Description

Statistics

Views

1903 since deposited on 2021-10-16
1last month
Acq. date: 2026-03-17

Citations

Statistics

Views

1903 since deposited on 2021-10-16
1last month
Acq. date: 2026-03-17

Citations