Publication:

Performance enhancement of Poly-Si/TiN/SiON based pMOSFETs by addition of an AlO capping layer

Date

2007
Journal article
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Author(s)

Singanamalla, Raghunath
;
Yu, HongYu
;
O'Sullivan, Barry  
;
Petry, Jasmine
;
Mercha, Abdelkarim  
;
Paraschiv, Vasile  
;
Volders, Henny  
;
Kubicek, Stefan  
;
De Meyer, Kristin  
;
Biesemans, Serge  

Journal

Microelectronic Engineering

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