Publication:
Performance enhancement of Poly-Si/TiN/SiON based pMOSFETs by addition of an AlO capping layer
Date
Loading...
Journal
Abstract
Description
Metrics
Views
1895 since deposited on 2021-10-16
Acq. date: 2025-10-23
Citations
Metrics
Views
1895 since deposited on 2021-10-16
Acq. date: 2025-10-23
Citations