Publication:

CMOS Scaling by Nanosheet Device Architectures and Backside Engineering

Date

2024

Proceedings Paper

https://doi.org/10.1109/VLSITSA60681.2024.10546439

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Author(s)

Horiguchi, Naoto

;

;

Ritzenthaler, Romain

;

Subramanian, Sujith

;

;

Schuddinck, Pieter

;

Veloso, Anabela

;

;

Serbulova, Kateryna

;

Ryckaert, Julien

Journal

N/A

Statistics

534 since deposited on 2024-08-16

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Acq. date: 2026-05-17