Publication:
CMOS Scaling by Nanosheet Device Architectures and Backside Engineering
| dc.contributor.author | Horiguchi, Naoto | |
| dc.contributor.author | Mertens, Hans | |
| dc.contributor.author | Ritzenthaler, Romain | |
| dc.contributor.author | Subramanian, Sujith | |
| dc.contributor.author | Weckx, Pieter | |
| dc.contributor.author | Schuddinck, Pieter | |
| dc.contributor.author | Veloso, Anabela | |
| dc.contributor.author | Yang, Sheng | |
| dc.contributor.author | Serbulova, Kateryna | |
| dc.contributor.author | Ryckaert, Julien | |
| dc.contributor.imecauthor | Horiguchi, Naoto | |
| dc.contributor.imecauthor | Mertens, Hans | |
| dc.contributor.imecauthor | Ritzenthaler, Romain | |
| dc.contributor.imecauthor | Subramanian, Sujith | |
| dc.contributor.imecauthor | Weckx, Pieter | |
| dc.contributor.imecauthor | Schuddinck, Pieter | |
| dc.contributor.imecauthor | Veloso, Anabela | |
| dc.contributor.imecauthor | Yang, Sheng | |
| dc.contributor.imecauthor | Serbulova, Kateryna | |
| dc.contributor.imecauthor | Ryckaert, Julien | |
| dc.contributor.orcidimec | Horiguchi, Naoto::0000-0001-5490-0416 | |
| dc.contributor.orcidimec | Mertens, Hans::0000-0002-3392-6892 | |
| dc.contributor.orcidimec | Ritzenthaler, Romain::0000-0002-8615-3272 | |
| dc.contributor.orcidimec | Subramanian, Sujith::0000-0001-8938-9750 | |
| dc.contributor.orcidimec | Schuddinck, Pieter::0000-0003-1893-3135 | |
| dc.contributor.orcidimec | Yang, Sheng::0000-0002-0658-5316 | |
| dc.contributor.orcidimec | Serbulova, Kateryna::0000-0001-7326-9949 | |
| dc.date.accessioned | 2024-12-19T09:28:14Z | |
| dc.date.available | 2024-08-16T18:29:16Z | |
| dc.date.available | 2024-12-19T09:28:14Z | |
| dc.date.issued | 2024 | |
| dc.identifier.doi | 10.1109/VLSITSA60681.2024.10546439 | |
| dc.identifier.eisbn | 979-8-3503-6034-9 | |
| dc.identifier.isbn | 979-8-3503-6035-6 | |
| dc.identifier.issn | N/A | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/44333 | |
| dc.publisher | IEEE | |
| dc.source.conference | International VLSI Symposium on Technology, Systems and Applications (VLSI) | |
| dc.source.conferencedate | APR 22-25, 2024 | |
| dc.source.conferencelocation | Hsinchu | |
| dc.source.journal | N/A | |
| dc.source.numberofpages | 2 | |
| dc.title | CMOS Scaling by Nanosheet Device Architectures and Backside Engineering | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
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