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Stress analysis ad junction leakage of sub-melt laser annealed SiGe epitacial layers
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Stress analysis ad junction leakage of sub-melt laser annealed SiGe epitacial layers
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Date
2010
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Bargallo Gonzalez, Mireia
;
Rosseel, Erik
;
Hikavyy, Andriy
;
Fernandez Lanas, Tatiana
;
Eneman, Geert
;
Verheyen, Peter
;
Loo, Roger
;
Simoen, Eddy
;
Claeys, Cor
Journal
IEEE Transactions on Semiconductor Manufacturing
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1861
since deposited on 2021-10-18
Acq. date: 2025-12-15
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Downloads
1
since deposited on 2021-10-18
Acq. date: 2025-12-15
Views
1861
since deposited on 2021-10-18
Acq. date: 2025-12-15
Citations