Publication:

Stress analysis ad junction leakage of sub-melt laser annealed SiGe epitacial layers

Date

2010
Journal article
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dc.contributor.authorBargallo Gonzalez, Mireia
dc.contributor.authorRosseel, Erik
dc.contributor.authorHikavyy, Andriy
dc.contributor.authorFernandez Lanas, Tatiana
dc.contributor.authorEneman, Geert
dc.contributor.authorVerheyen, Peter
dc.contributor.authorLoo, Roger
dc.contributor.authorSimoen, Eddy
dc.contributor.authorClaeys, Cor
dc.contributor.imecauthorRosseel, Erik
dc.contributor.imecauthorHikavyy, Andriy
dc.contributor.imecauthorEneman, Geert
dc.contributor.imecauthorVerheyen, Peter
dc.contributor.imecauthorLoo, Roger
dc.contributor.imecauthorSimoen, Eddy
dc.contributor.orcidimecHikavyy, Andriy::0000-0002-8201-075X
dc.contributor.orcidimecEneman, Geert::0000-0002-5849-3384
dc.contributor.orcidimecLoo, Roger::0000-0003-3513-6058
dc.contributor.orcidimecSimoen, Eddy::0000-0002-5218-4046
dc.date.accessioned2021-10-18T15:18:04Z
dc.date.available2021-10-18T15:18:04Z
dc.date.embargo9999-12-31
dc.date.issued2010
dc.identifier.issn0894-6507
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/16705
dc.source.beginpage538
dc.source.endpage544
dc.source.issue4
dc.source.journalIEEE Transactions on Semiconductor Manufacturing
dc.source.volume23
dc.title

Stress analysis ad junction leakage of sub-melt laser annealed SiGe epitacial layers

dc.typeJournal article
dspace.entity.typePublication
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