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Articles
New plating bath for electroless copper deposition on sputtered barrier layers
Publication:
New plating bath for electroless copper deposition on sputtered barrier layers
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Date
2000
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4511.pdf
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Lantasov, Yuri
;
Palmans, Roger
;
Maex, Karen
Journal
Microelectronic Engineering
Abstract
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1916
since deposited on 2021-10-14
Acq. date: 2025-12-11
Citations
Metrics
Views
1916
since deposited on 2021-10-14
Acq. date: 2025-12-11
Citations