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A study of breakdown mechanisms in electrostatic actuators using mechanical response under EOS-ESD stress
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1898 since deposited on 2021-10-18
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Acq. date: 2025-10-24
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Views
1898 since deposited on 2021-10-18
410item.page.metrics.field.last-week
Acq. date: 2025-10-24
Citations