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A study of breakdown mechanisms in electrostatic actuators using mechanical response under EOS-ESD stress
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A study of breakdown mechanisms in electrostatic actuators using mechanical response under EOS-ESD stress
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Date
2009
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Sangameswaran, Sandeep
;
De Coster, Jeroen
;
Scholz, Mirko
;
Linten, Dimitri
;
Thijs, Steven
;
Van Hoof, Chris
;
De Wolf, Ingrid
;
Groeseneken, Guido
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1899
since deposited on 2021-10-18
1
last month
Acq. date: 2025-12-10
Citations