Publication:

A study of breakdown mechanisms in electrostatic actuators using mechanical response under EOS-ESD stress

Date

2009
Proceedings Paper
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dc.contributor.authorSangameswaran, Sandeep
dc.contributor.authorDe Coster, Jeroen
dc.contributor.authorScholz, Mirko
dc.contributor.authorLinten, Dimitri
dc.contributor.authorThijs, Steven
dc.contributor.authorVan Hoof, Chris
dc.contributor.authorDe Wolf, Ingrid
dc.contributor.authorGroeseneken, Guido
dc.contributor.imecauthorDe Coster, Jeroen
dc.contributor.imecauthorLinten, Dimitri
dc.contributor.imecauthorThijs, Steven
dc.contributor.imecauthorVan Hoof, Chris
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.imecauthorGroeseneken, Guido
dc.contributor.orcidimecLinten, Dimitri::0000-0001-8434-1838
dc.contributor.orcidimecThijs, Steven::0000-0003-2889-8345
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.date.accessioned2021-10-18T02:35:13Z
dc.date.available2021-10-18T02:35:13Z
dc.date.embargo9999-12-31
dc.date.issued2009
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/16154
dc.source.beginpage3B.5
dc.source.conference31st Annual EOS/ESD Symposium
dc.source.conferencedate30/08/2009
dc.source.conferencelocationAnaheim, CA USA
dc.title

A study of breakdown mechanisms in electrostatic actuators using mechanical response under EOS-ESD stress

dc.typeProceedings paper
dspace.entity.typePublication
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