Publication:
Identification of critical parameters for plasma process-induced damage in 130 and 100 nm CMOS technologies
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1866 since deposited on 2021-10-14
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Acq. date: 2026-10-06
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Statistics
Views
1866 since deposited on 2021-10-14
1last month
1last week
Acq. date: 2026-10-06
Citations