Publication:
Identification of critical parameters for plasma process-induced damage in 130 and 100 nm CMOS technologies
Date
| dc.contributor.author | Van den Bosch, Geert | |
| dc.contributor.author | De Jaeger, Brice | |
| dc.contributor.author | Tokei, Zsolt | |
| dc.contributor.author | Groeseneken, Guido | |
| dc.contributor.imecauthor | Van den Bosch, Geert | |
| dc.contributor.imecauthor | De Jaeger, Brice | |
| dc.contributor.imecauthor | Tokei, Zsolt | |
| dc.contributor.imecauthor | Groeseneken, Guido | |
| dc.contributor.orcidimec | Van den Bosch, Geert::0000-0001-9971-6954 | |
| dc.contributor.orcidimec | De Jaeger, Brice::0000-0001-8804-7556 | |
| dc.date.accessioned | 2021-10-14T23:30:57Z | |
| dc.date.available | 2021-10-14T23:30:57Z | |
| dc.date.issued | 2002 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/6921 | |
| dc.source.beginpage | 271 | |
| dc.source.conference | ESSDERC - 32nd European Solid-State Device Research Conference | |
| dc.source.conferencedate | 24/09/2002 | |
| dc.source.conferencelocation | Firenze Italy | |
| dc.source.endpage | 274 | |
| dc.title | Identification of critical parameters for plasma process-induced damage in 130 and 100 nm CMOS technologies | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
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