Publication:
Extreme Ultraviolet Lithographic Performance and Reaction Mechanism of Polymeric Resist-Utilizing Radical- and Acid-Amplified Cross-Linking
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620 since deposited on 2024-02-18
Acq. date: 2025-10-25
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Views
620 since deposited on 2024-02-18
Acq. date: 2025-10-25
Citations