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Impact of monolayer WS2 surface properties on the gate dielectrics formation by atomic layer deposition
Publication:
Impact of monolayer WS2 surface properties on the gate dielectrics formation by atomic layer deposition
Date
2024
Journal article
https://doi.org/10.1116/6.0003894
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Lin, Zaoyang
;
Dekelver, Sven
;
Cott, Daire
;
Groven, Benjamin
;
Sergeant, Stefanie
;
Conard, Thierry
;
Wu, Xiangyu
;
Morin, Pierre
;
Lin, Dennis
;
Lockhart de la Rosa, Cesar Javier
;
Kar, Gouri Sankar
;
Delabie, Annelies
Journal
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
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151
since deposited on 2024-11-10
Acq. date: 2025-10-25
Citations
Metrics
Views
151
since deposited on 2024-11-10
Acq. date: 2025-10-25
Citations