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In-situ study of self-forming barriers from a Cu-Mn alloy in 100 nm Cu/Low-k damascene interconnects using synchrotron radiation
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1822 since deposited on 2021-10-18
Acq. date: 2025-10-23
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Views
1822 since deposited on 2021-10-18
Acq. date: 2025-10-23
Citations