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In-situ study of self-forming barriers from a Cu-Mn alloy in 100 nm Cu/Low-k damascene interconnects using synchrotron radiation
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1828 since deposited on 2021-10-18
3last month
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Acq. date: 2026-01-07
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Views
1828 since deposited on 2021-10-18
3last month
2last week
Acq. date: 2026-01-07
Citations