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In-situ study of self-forming barriers from a Cu-Mn alloy in 100 nm Cu/Low-k damascene interconnects using synchrotron radiation

Date

2009
Meeting abstract
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dc.contributor.authorWilson, Chris
dc.contributor.authorVolders, Henny
dc.contributor.authorTokei, Zsolt
dc.contributor.authorCroes, Kristof
dc.contributor.authorPantouvaki, Marianna
dc.contributor.authorBeyer, Gerald
dc.contributor.authorHorsfall, Alton B.
dc.contributor.authorO'Neill, Anthony G.
dc.contributor.imecauthorWilson, Chris
dc.contributor.imecauthorVolders, Henny
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.imecauthorCroes, Kristof
dc.contributor.imecauthorPantouvaki, Marianna
dc.contributor.imecauthorBeyer, Gerald
dc.contributor.orcidimecCroes, Kristof::0000-0002-3955-0638
dc.date.accessioned2021-10-18T05:19:51Z
dc.date.available2021-10-18T05:19:51Z
dc.date.issued2009
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/16548
dc.source.beginpage97
dc.source.conference18th Workshop Materials for Advanced Metallization - MAM
dc.source.conferencedate8/03/2009
dc.source.conferencelocationGrenoble France
dc.source.endpage98
dc.title

In-situ study of self-forming barriers from a Cu-Mn alloy in 100 nm Cu/Low-k damascene interconnects using synchrotron radiation

dc.typeMeeting abstract
dspace.entity.typePublication
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