Publication:
Assessing the performance of two-dimensional dopant profiling techniques
Date
| dc.contributor.author | Duhayon, Natasja | |
| dc.contributor.author | Eyben, Pierre | |
| dc.contributor.author | Fouchier, Marc | |
| dc.contributor.author | Clarysse, Trudo | |
| dc.contributor.author | Vandervorst, Wilfried | |
| dc.contributor.author | Alvarez, David | |
| dc.contributor.author | Schoemann, S. | |
| dc.contributor.author | Ciappa, M. | |
| dc.contributor.author | Stangoni, M. | |
| dc.contributor.author | Fichtner, W. | |
| dc.contributor.author | Formanek, P. | |
| dc.contributor.author | Raineri, V. | |
| dc.contributor.author | Giannazzo, F. | |
| dc.contributor.author | Goghero, D. | |
| dc.contributor.author | Rosenwaks, Y. | |
| dc.contributor.author | Shikler, R. | |
| dc.contributor.author | Saraf, S. | |
| dc.contributor.author | Sadewasser, S. | |
| dc.contributor.author | Barreau, N. | |
| dc.contributor.author | Glatzel, T. | |
| dc.contributor.imecauthor | Duhayon, Natasja | |
| dc.contributor.imecauthor | Eyben, Pierre | |
| dc.contributor.imecauthor | Vandervorst, Wilfried | |
| dc.date.accessioned | 2021-10-15T04:35:32Z | |
| dc.date.available | 2021-10-15T04:35:32Z | |
| dc.date.issued | 2003 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/7535 | |
| dc.source.beginpage | 215 | |
| dc.source.conference | Ultra Shallow Junctions. 7th Int. Worksh. Fabrication, Characterization and Modeling of Ultra Shallow Doping Profiles in Semic. | |
| dc.source.conferencedate | 27/04/2003 | |
| dc.source.conferencelocation | Santa Cruz, CA USA | |
| dc.source.endpage | 226 | |
| dc.title | Assessing the performance of two-dimensional dopant profiling techniques | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
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