Publication:

Subtractive etch of ruthenium for sub-5nm interconnect

Date

2018

Proceedings Paper

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Files

38700.pdf 1.94 MB

Author(s)

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Rassoul, Nouredine

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Kutrzeba Kotowska, Bogumila

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Adelmann, Christoph

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Lazzarino, Frederic

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Ercken, Monique

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Boemmels, Juergen

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Statistics

2283 since deposited on 2021-10-26

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Acq. date: 2026-02-24