Publication:
Integrating a hydrogen silsesquioxane spin-on dielectric in a quarter micron technology
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1939 since deposited on 2021-09-30
2last month
Acq. date: 2026-03-17
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Statistics
Views
1939 since deposited on 2021-09-30
2last month
Acq. date: 2026-03-17
Citations