Publication:
Integrating a hydrogen silsesquioxane spin-on dielectric in a quarter micron technology
Date
| dc.contributor.author | Waeterloos, Joost | |
| dc.contributor.author | Meynen, Herman | |
| dc.contributor.author | Coenegrachts, Bart | |
| dc.contributor.author | Gao, Teng | |
| dc.contributor.author | Grillaert, Joost | |
| dc.contributor.author | Van den hove, Luc | |
| dc.contributor.imecauthor | Coenegrachts, Bart | |
| dc.contributor.imecauthor | Van den hove, Luc | |
| dc.date.accessioned | 2021-09-30T10:05:52Z | |
| dc.date.available | 2021-09-30T10:05:52Z | |
| dc.date.issued | 1997 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/2301 | |
| dc.source.beginpage | 310 | |
| dc.source.conference | 3rd International Dielectrics for ULSI Multilevel Interconnection Conference - DUMIC | |
| dc.source.conferencedate | 10/02/1997 | |
| dc.source.conferencelocation | Santa Clara, CA USA | |
| dc.source.endpage | 316 | |
| dc.title | Integrating a hydrogen silsesquioxane spin-on dielectric in a quarter micron technology | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
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