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An in-situ resistance measurement to extract IMC resistivity and kinetic parameter of alternative metallurgies for 3D stacking
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An in-situ resistance measurement to extract IMC resistivity and kinetic parameter of alternative metallurgies for 3D stacking
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Date
2018
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Hou, Lin
;
Derakhshandeh, Jaber
;
Radisic, Alex
;
Honore, Mia
;
De Coster, Jeroen
;
Cherman, Vladimir
;
Bex, Pieter
;
Beyer, Gerald
;
Beyne, Eric
;
De Wolf, Ingrid
;
Rebibis, Kenneth June
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1998
since deposited on 2021-10-25
1
last month
Acq. date: 2025-12-11
Citations
Metrics
Views
1998
since deposited on 2021-10-25
1
last month
Acq. date: 2025-12-11
Citations