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An in-situ resistance measurement to extract IMC resistivity and kinetic parameter of alternative metallurgies for 3D stacking

Date

2018
Proceedings Paper
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dc.contributor.authorHou, Lin
dc.contributor.authorDerakhshandeh, Jaber
dc.contributor.authorRadisic, Alex
dc.contributor.authorHonore, Mia
dc.contributor.authorDe Coster, Jeroen
dc.contributor.authorCherman, Vladimir
dc.contributor.authorBex, Pieter
dc.contributor.authorBeyer, Gerald
dc.contributor.authorBeyne, Eric
dc.contributor.authorDe Wolf, Ingrid
dc.contributor.authorRebibis, Kenneth June
dc.contributor.imecauthorHou, Lin
dc.contributor.imecauthorDerakhshandeh, Jaber
dc.contributor.imecauthorRadisic, Alex
dc.contributor.imecauthorDe Coster, Jeroen
dc.contributor.imecauthorCherman, Vladimir
dc.contributor.imecauthorBex, Pieter
dc.contributor.imecauthorBeyer, Gerald
dc.contributor.imecauthorBeyne, Eric
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.imecauthorRebibis, Kenneth June
dc.contributor.orcidimecDerakhshandeh, Jaber::0000-0003-2448-9165
dc.contributor.orcidimecBex, Pieter::0000-0003-0896-2514
dc.contributor.orcidimecBeyne, Eric::0000-0002-3096-050X
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.date.accessioned2021-10-25T19:56:37Z
dc.date.available2021-10-25T19:56:37Z
dc.date.embargo9999-12-31
dc.date.issued2018
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/30907
dc.identifier.urlhttps://ieeexplore.ieee.org/document/8546500
dc.source.beginpage1
dc.source.conference7th Electronic System-Integration Technology Conference - ESTC
dc.source.conferencedate18/09/2018
dc.source.conferencelocationDresden Germany
dc.source.endpage8
dc.title

An in-situ resistance measurement to extract IMC resistivity and kinetic parameter of alternative metallurgies for 3D stacking

dc.typeProceedings paper
dspace.entity.typePublication
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