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Isotropic Etches to Enable Forksheet FET Integration
Publication:
Isotropic Etches to Enable Forksheet FET Integration
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Date
2021
Meeting abstract
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Oniki, Yusuke
;
Mertens, Hans
;
Puttarame Gowda, Pallavi
;
Sebaai, Farid
;
Altamirano Sanchez, Efrain
;
Holsteyns, Frank
;
Horiguchi, Naoto
Journal
n/a
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1853
since deposited on 2021-12-01
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Acq. date: 2026-01-05
Citations
Metrics
Views
1853
since deposited on 2021-12-01
5
last month
1
last week
Acq. date: 2026-01-05
Citations