Publication:

Isotropic Etches to Enable Forksheet FET Integration

Date

2021

Meeting abstract

Simple item page Full metadata Statistics

Author(s)

;

;

Puttarame Gowda, Pallavi

;

;

Altamirano Sanchez, Efrain

;

Holsteyns, Frank

;

Horiguchi, Naoto

Journal

n/a

Statistics

1866 since deposited on 2021-12-01

Acq. date: 2026-10-12