Publication:

Isotropic Etches to Enable Forksheet FET Integration

Date

2021
Meeting abstract
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dc.contributor.authorOniki, Yusuke
dc.contributor.authorMertens, Hans
dc.contributor.authorPuttarame Gowda, Pallavi
dc.contributor.authorSebaai, Farid
dc.contributor.authorAltamirano Sanchez, Efrain
dc.contributor.authorHolsteyns, Frank
dc.contributor.authorHoriguchi, Naoto
dc.contributor.imecauthorOniki, Yusuke
dc.contributor.imecauthorMertens, Hans
dc.contributor.imecauthorPuttarame Gowda, Pallavi
dc.contributor.imecauthorSebaai, Farid
dc.contributor.imecauthorAltamirano Sanchez, Efrain
dc.contributor.imecauthorHolsteyns, Frank
dc.contributor.imecauthorHoriguchi, Naoto
dc.contributor.orcidimecOniki, Yusuke::0000-0002-6619-1327
dc.contributor.orcidimecHoriguchi, Naoto::0000-0001-5490-0416
dc.date.accessioned2022-02-10T13:16:30Z
dc.date.available2021-12-01T16:09:17Z
dc.date.available2022-02-10T13:16:30Z
dc.date.issued2021
dc.identifier.issnn/a
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/38515
dc.source.conferenceSurface Preparation and Cleaning Conference (SPCC)
dc.source.conferencedate2021
dc.source.conferencelocationVirtual
dc.source.journaln/a
dc.source.numberofpages1
dc.title

Isotropic Etches to Enable Forksheet FET Integration

dc.typeMeeting abstract
dspace.entity.typePublication
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