Publication:

CMOS area scaling and the need for high aspect ratio vias

Date

2018
Proceedings Paper
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38899.pdf 2.66 MB

Author(s)

Briggs, Basoene  
;
Guissi, Sofiane  
;
Wilson, Chris  
;
Ryckaert, Julien  
;
Paolillo, Sara  
;
Vandersmissen, Kevin  
;
Versluijs, Janko  
;
Lorant, Christophe  
;
Heylen, Nancy  
;
Boemmels, Juergen  
;
Tokei, Zsolt  
;
Sherazi, Yasser  
;
Weckx, Pieter  
;
Kljucar, Luka  
;
van der Veen, Marleen  
;
Boccardi, Guillaume  
;
De Heyn, Vincent  
;
Gupta, Anshul  
;
Ervin, Joseph
;
Kamon, Matt

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1987 since deposited on 2021-10-25
Acq. date: 2026-05-03

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1987 since deposited on 2021-10-25
Acq. date: 2026-05-03

Citations