Publication:

Direct yield prediction from SEM images

Date

2023
Proceedings Paper
https://doi.org/10.1117/12.2658294
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Author(s)

Choona, Lilach
;
Linshiz, Jasmine
;
Pres, Shaul
;
Levant, Boris
;
Tal, Noam
;
Santoro, Gaetano
;
Baudot, Sylvain  
;
Opdebeeck, Ann  
;
Reifsnider, Jason  
;
Vadakupudhu Palayam, Senthil  
;
Lorusso, Gian  
;
Mitard, Jerome  
;
Yogev, Shay

Journal

Proceedings of SPIE

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765 since deposited on 2023-07-28
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765 since deposited on 2023-07-28
2last month
Acq. date: 2026-02-24

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