Publication:

Direct yield prediction from SEM images

Date

2023
Proceedings Paper
https://doi.org/10.1117/12.2658294
Simple item page Full metadata Statistics
 
dc.contributor.authorChoona, Lilach
dc.contributor.authorLinshiz, Jasmine
dc.contributor.authorPres, Shaul
dc.contributor.authorLevant, Boris
dc.contributor.authorTal, Noam
dc.contributor.authorSantoro, Gaetano
dc.contributor.authorBaudot, Sylvain
dc.contributor.authorOpdebeeck, Ann
dc.contributor.authorReifsnider, Jason
dc.contributor.authorVadakupudhu Palayam, Senthil
dc.contributor.authorLorusso, Gian
dc.contributor.authorMitard, Jerome
dc.contributor.authorYogev, Shay
dc.contributor.imecauthorBaudot, Sylvain
dc.contributor.imecauthorOpdebeeck, Ann
dc.contributor.imecauthorReifsnider, Jason
dc.contributor.imecauthorLorusso, Gian
dc.contributor.imecauthorMitard, Jerome
dc.contributor.imecauthorVadakupudhu Palayam, Senthil
dc.contributor.orcidimecMitard, Jerome::0000-0002-7422-079X
dc.contributor.orcidimecBaudot, Sylvain::0009-0009-2671-0784
dc.contributor.orcidimecOpdebeeck, Ann::0000-0001-6737-2456
dc.contributor.orcidimecReifsnider, Jason::0000-0002-4248-4037
dc.contributor.orcidimecLorusso, Gian::0000-0003-3498-5082
dc.contributor.orcidimecVadakupudhu Palayam, Senthil::0000-0002-0855-3377
dc.date.accessioned2024-06-06T07:41:30Z
dc.date.available2023-07-28T17:39:56Z
dc.date.available2024-06-06T07:41:30Z
dc.date.issued2023
dc.identifier.doi10.1117/12.2658294
dc.identifier.eisbn978-1-5106-6100-4
dc.identifier.isbn978-1-5106-6099-1
dc.identifier.issn0277-786X
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/42237
dc.publisherSPIE-INT SOC OPTICAL ENGINEERING
dc.source.beginpage124960Q
dc.source.conferenceConference on Metrology, Inspection, and Process Control XXXVII
dc.source.conferencedateFEB 27-MAR 02, 2023
dc.source.conferencelocationSan Jose
dc.source.journalProceedings of SPIE
dc.source.numberofpages9
dc.source.volume12496
dc.title

Direct yield prediction from SEM images

dc.typeProceedings paper
dspace.entity.typePublication
Files
Publication available in collections:
Conference contributions