Dipole-First Gate Stack as a Scalable and Thermal Budget Flexible Multi-Vt Solution for Nanosheet/CFET Devices

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Author(s)

Arimura, Hiroaki

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Ragnarsson, Lars-Ake

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Vandooren, Anne

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Verni, G. Alessio

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Biesemans, Serge

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Dentoni Litta, Eugenio

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Horiguchi, Naoto

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1763 since deposited on 2022-07-09

Acq. date: 2025-10-23