Publication:
Dipole-First Gate Stack as a Scalable and Thermal Budget Flexible Multi-Vt Solution for Nanosheet/CFET Devices
| dc.contributor.author | Arimura, Hiroaki | |
| dc.contributor.author | Ragnarsson, Lars-Ake | |
| dc.contributor.author | Oniki, Yusuke | |
| dc.contributor.author | Franco, Jacopo | |
| dc.contributor.author | Vandooren, Anne | |
| dc.contributor.author | Brus, Stephan | |
| dc.contributor.author | Leonhardt, A. | |
| dc.contributor.author | Sippola, P. | |
| dc.contributor.author | Ivanova, T. | |
| dc.contributor.author | Verni, G. Alessio | |
| dc.contributor.author | Chang, R-J | |
| dc.contributor.author | Xie, Q. | |
| dc.contributor.author | Givens, M. | |
| dc.contributor.author | Mitard, Jerome | |
| dc.contributor.author | Biesemans, Serge | |
| dc.contributor.author | Dentoni Litta, Eugenio | |
| dc.contributor.author | Horiguchi, Naoto | |
| dc.contributor.imecauthor | Arimura, Hiroaki | |
| dc.contributor.imecauthor | Ragnarsson, Lars-Ake | |
| dc.contributor.imecauthor | Oniki, Yusuke | |
| dc.contributor.imecauthor | Franco, Jacopo | |
| dc.contributor.imecauthor | Vandooren, Anne | |
| dc.contributor.imecauthor | Brus, Stephan | |
| dc.contributor.imecauthor | Mitard, Jerome | |
| dc.contributor.imecauthor | Biesemans, Serge | |
| dc.contributor.imecauthor | Dentoni Litta, Eugenio | |
| dc.contributor.imecauthor | Horiguchi, Naoto | |
| dc.contributor.orcidimec | Ragnarsson, Lars-Ake::0000-0003-1057-8140 | |
| dc.contributor.orcidimec | Oniki, Yusuke::0000-0002-6619-1327 | |
| dc.contributor.orcidimec | Franco, Jacopo::0000-0002-7382-8605 | |
| dc.contributor.orcidimec | Vandooren, Anne::0000-0002-2412-0176 | |
| dc.contributor.orcidimec | Brus, Stephan::0000-0003-3554-0640 | |
| dc.contributor.orcidimec | Mitard, Jerome::0000-0002-7422-079X | |
| dc.contributor.orcidimec | Dentoni Litta, Eugenio::0000-0003-0333-376X | |
| dc.contributor.orcidimec | Horiguchi, Naoto::0000-0001-5490-0416 | |
| dc.date.accessioned | 2022-08-25T14:12:43Z | |
| dc.date.available | 2022-07-09T02:27:24Z | |
| dc.date.available | 2022-08-25T14:12:43Z | |
| dc.date.issued | 2021 | |
| dc.identifier.doi | 10.1109/IEDM19574.2021.9720527 | |
| dc.identifier.eisbn | 978-1-6654-2572-8 | |
| dc.identifier.issn | 2380-9248 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/40080 | |
| dc.publisher | IEEE | |
| dc.source.conference | IEEE International Electron Devices Meeting (IEDM) | |
| dc.source.conferencedate | DEC 11-16, 2021 | |
| dc.source.conferencelocation | San Francisco | |
| dc.source.journal | na | |
| dc.source.numberofpages | 4 | |
| dc.title | Dipole-First Gate Stack as a Scalable and Thermal Budget Flexible Multi-Vt Solution for Nanosheet/CFET Devices | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
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