Publication:

Front-side Integration of Middle-of-line Stacked Contacts for Monolithic CFET

Date

2024
Proceedings Paper
https://doi.org/10.1109/IITC61274.2024.10732165
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dc.contributor.authorVega Gonzalez, Victor
dc.contributor.authorStiers, Karen
dc.contributor.authorSheng, C.
dc.contributor.authorDemuynck, Steven
dc.contributor.authorToledo de Carvalho Cavalcante, Camila
dc.contributor.authorPetersen Barbosa Lima, Lucas
dc.contributor.authorChiarella, Thomas
dc.contributor.authorBoemmels, Juergen
dc.contributor.authorSarkar T.
dc.contributor.authorFranchina Vergel, Nathali
dc.contributor.authorRadisic, Dunja
dc.contributor.authorLoo, Roger
dc.contributor.authorRosseel, Erik
dc.contributor.authorPorret, Clément
dc.contributor.authorMannaert, Geert
dc.contributor.authorChoudhury, Subhobroto
dc.contributor.authorBrissonneau, Vincent
dc.contributor.authorDupuy, Emmanuel
dc.contributor.authorPeter, Antony
dc.contributor.authorJourdan, Nicolas
dc.contributor.imecauthorVega-Gonzalez, V.
dc.contributor.imecauthorStiers, K.
dc.contributor.imecauthorSheng, C.
dc.contributor.imecauthorDemuynck, S.
dc.contributor.imecauthorCavalcante, C. Toledo de Carvalho
dc.contributor.imecauthorPetersen, L.
dc.contributor.imecauthorChiarella, T.
dc.contributor.imecauthorBoemmels, J.
dc.contributor.imecauthorSarkar, T.
dc.contributor.imecauthorVergel, N. Franchina
dc.contributor.imecauthorRadisic, D.
dc.contributor.imecauthorLoo, R.
dc.contributor.imecauthorRosseel, E.
dc.contributor.imecauthorPorret, C.
dc.contributor.imecauthorMannaert, G.
dc.contributor.imecauthorChoudhury, S.
dc.contributor.imecauthorBrissonneau, V
dc.contributor.imecauthorDupuy, E.
dc.contributor.imecauthorPeter, A.
dc.contributor.imecauthorJourdan, N.
dc.date.accessioned2025-03-06T20:46:39Z
dc.date.available2025-03-06T20:46:39Z
dc.date.issued2024
dc.description.wosFundingTextThe imec sub-10nm program members, the European commission and local authorities, the imec pilot line, and amsimec (test lab) are acknowledged for their support.
dc.identifier.doi10.1109/IITC61274.2024.10732165
dc.identifier.eisbn979-8-3503-8517-5
dc.identifier.isbn979-8-3503-8518-2
dc.identifier.issn2380-632X
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/45344
dc.publisherIEEE
dc.source.conference2024 International Interconnect Technology Conference
dc.source.conferencedate2024-06-03
dc.source.conferencelocationSan Jose
dc.source.numberofpages3
dc.title

Front-side Integration of Middle-of-line Stacked Contacts for Monolithic CFET

dc.typeProceedings paper
dspace.entity.typePublication
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