Publication:
Front-side Integration of Middle-of-line Stacked Contacts for Monolithic CFET
| dc.contributor.author | Vega Gonzalez, Victor | |
| dc.contributor.author | Stiers, Karen | |
| dc.contributor.author | Sheng, C. | |
| dc.contributor.author | Demuynck, Steven | |
| dc.contributor.author | Toledo de Carvalho Cavalcante, Camila | |
| dc.contributor.author | Petersen Barbosa Lima, Lucas | |
| dc.contributor.author | Chiarella, Thomas | |
| dc.contributor.author | Boemmels, Juergen | |
| dc.contributor.author | Sarkar T. | |
| dc.contributor.author | Franchina Vergel, Nathali | |
| dc.contributor.author | Radisic, Dunja | |
| dc.contributor.author | Loo, Roger | |
| dc.contributor.author | Rosseel, Erik | |
| dc.contributor.author | Porret, Clément | |
| dc.contributor.author | Mannaert, Geert | |
| dc.contributor.author | Choudhury, Subhobroto | |
| dc.contributor.author | Brissonneau, Vincent | |
| dc.contributor.author | Dupuy, Emmanuel | |
| dc.contributor.author | Peter, Antony | |
| dc.contributor.author | Jourdan, Nicolas | |
| dc.contributor.imecauthor | Vega-Gonzalez, V. | |
| dc.contributor.imecauthor | Stiers, K. | |
| dc.contributor.imecauthor | Sheng, C. | |
| dc.contributor.imecauthor | Demuynck, S. | |
| dc.contributor.imecauthor | Cavalcante, C. Toledo de Carvalho | |
| dc.contributor.imecauthor | Petersen, L. | |
| dc.contributor.imecauthor | Chiarella, T. | |
| dc.contributor.imecauthor | Boemmels, J. | |
| dc.contributor.imecauthor | Sarkar, T. | |
| dc.contributor.imecauthor | Vergel, N. Franchina | |
| dc.contributor.imecauthor | Radisic, D. | |
| dc.contributor.imecauthor | Loo, R. | |
| dc.contributor.imecauthor | Rosseel, E. | |
| dc.contributor.imecauthor | Porret, C. | |
| dc.contributor.imecauthor | Mannaert, G. | |
| dc.contributor.imecauthor | Choudhury, S. | |
| dc.contributor.imecauthor | Brissonneau, V | |
| dc.contributor.imecauthor | Dupuy, E. | |
| dc.contributor.imecauthor | Peter, A. | |
| dc.contributor.imecauthor | Jourdan, N. | |
| dc.date.accessioned | 2025-03-06T20:46:39Z | |
| dc.date.available | 2025-03-06T20:46:39Z | |
| dc.date.issued | 2024 | |
| dc.description.wosFundingText | The imec sub-10nm program members, the European commission and local authorities, the imec pilot line, and amsimec (test lab) are acknowledged for their support. | |
| dc.identifier.doi | 10.1109/IITC61274.2024.10732165 | |
| dc.identifier.eisbn | 979-8-3503-8517-5 | |
| dc.identifier.isbn | 979-8-3503-8518-2 | |
| dc.identifier.issn | 2380-632X | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/45344 | |
| dc.publisher | IEEE | |
| dc.source.conference | 2024 International Interconnect Technology Conference | |
| dc.source.conferencedate | 2024-06-03 | |
| dc.source.conferencelocation | San Jose | |
| dc.source.numberofpages | 3 | |
| dc.title | Front-side Integration of Middle-of-line Stacked Contacts for Monolithic CFET | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
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