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SiGe SEG growth for buried channel p-MOS devices
Publication:
SiGe SEG growth for buried channel p-MOS devices
Date
2009-10
Proceedings Paper
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18833.pdf
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Hikavyy, Andriy
;
Loo, Roger
;
Witters, Liesbeth
;
Takeoka, Shinji
;
Geypen, Jef
;
Brijs, Bert
;
Merckling, Clement
;
Caymax, Matty
;
Dekoster, Johan
Journal
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1935
since deposited on 2021-10-17
Acq. date: 2025-10-23
Citations
Metrics
Views
1935
since deposited on 2021-10-17
Acq. date: 2025-10-23
Citations