Publication:

SiGe SEG growth for buried channel p-MOS devices

Date

2009-10

Proceedings Paper

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Files

18833.pdf 544.33 KB

Author(s)

Hikavyy, Andriy

;

;

Witters, Liesbeth

;

Takeoka, Shinji

;

;

;

Merckling, Clement

;

;

Dekoster, Johan

Statistics

1941 since deposited on 2021-10-17

Acq. date: 2026-04-26