Publication:

Resist fundamentals for resolution, LER and sensitivity (RLS) performance tradeoffs and their relation to micro-bridging defects

Date

2009
Proceedings Paper
Simple item page Full metadata Statistics
 
dc.contributor.authorRathsack, Benjamin
dc.contributor.authorNafus, Kathleen
dc.contributor.authorHatakeyama, Shinichi
dc.contributor.authorKuwahara, Yuhei
dc.contributor.authorKitano, Junichi
dc.contributor.authorGronheid, Roel
dc.contributor.authorVaglio Pret, Alessandro
dc.contributor.imecauthorNafus, Kathleen
dc.contributor.imecauthorGronheid, Roel
dc.contributor.imecauthorVaglio Pret, Alessandro
dc.date.accessioned2021-10-18T02:13:46Z
dc.date.available2021-10-18T02:13:46Z
dc.date.embargo9999-12-31
dc.date.issued2009
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/16099
dc.source.beginpage727347
dc.source.conferenceAdvances in Resist Materials and Processing Technology XXVI
dc.source.conferencedate22/02/2009
dc.source.conferencelocationSan Jose, CA USA
dc.title

Resist fundamentals for resolution, LER and sensitivity (RLS) performance tradeoffs and their relation to micro-bridging defects

dc.typeProceedings paper
dspace.entity.typePublication
Files

Original bundle

Name:
17920.pdf
Size:
818.98 KB
Format:
Adobe Portable Document Format
Download
Publication available in collections:
Conference contributions