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Articles
Microtexture and electromigration-induced drift in electroplated damascene Cu
Publication:
Microtexture and electromigration-induced drift in electroplated damascene Cu
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Date
2000
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Proost, Joris
;
Hirato, T.
;
Furuhara, T.
;
Maex, Karen
;
Celis, Jean-Pierre
Journal
Journal of Applied Physics
Abstract
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1905
since deposited on 2021-10-14
1
last month
Acq. date: 2025-12-10
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Views
1905
since deposited on 2021-10-14
1
last month
Acq. date: 2025-12-10
Citations