Microtexture and electromigration-induced drift in electroplated damascene Cu

dc.contributor.author	Proost, Joris
dc.contributor.author	Hirato, T.
dc.contributor.author	Furuhara, T.
dc.contributor.author	Maex, Karen
dc.contributor.author	Celis, Jean-Pierre
dc.contributor.imecauthor	Maex, Karen
dc.date.accessioned	2021-10-14T13:36:56Z
dc.date.available	2021-10-14T13:36:56Z
dc.date.embargo	9999-12-31
dc.date.issued	2000
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/4679
dc.source.beginpage	2792
dc.source.endpage	2802
dc.source.issue	6
dc.source.journal	Journal of Applied Physics
dc.source.volume	87
dc.title	Microtexture and electromigration-induced drift in electroplated damascene Cu
dc.type	Journal article
dspace.entity.type	Publication
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