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Articles
Off-axis Raman spectroscopy for nanoscale stress metrology
Publication:
Off-axis Raman spectroscopy for nanoscale stress metrology
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Date
2022
Journal article
https://doi.org/10.1063/5.0100602
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2.93 MB
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Khan, Zoheb
;
Nuytten, Thomas
;
Favia, Paola
;
Fleischmann, Claudia
;
De Wolf, Ingrid
;
Vandervorst, Wilfried
Journal
JOURNAL OF APPLIED PHYSICS
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214
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Acq. date: 2026-01-06
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1466
since deposited on 2022-08-05
Acq. date: 2026-01-06
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Metrics
Downloads
214
since deposited on 2022-08-05
34
last month
5
last week
Acq. date: 2026-01-06
Views
1466
since deposited on 2022-08-05
Acq. date: 2026-01-06
Citations