Publication:

Off-axis Raman spectroscopy for nanoscale stress metrology

Date

2022
Journal article
https://doi.org/10.1063/5.0100602
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Author(s)

Khan, Zoheb  
;
Nuytten, Thomas  
;
Favia, Paola  
;
Fleischmann, Claudia  
;
De Wolf, Ingrid  
;
Vandervorst, Wilfried  

Journal

JOURNAL OF APPLIED PHYSICS

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342 since deposited on 2022-08-05
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